XPS analysis of sol‐gel processed doped and undoped TiO2 films for sensors

R. Zanoni*, G. Righini, A. Montenero, G. Gnappi, G. Montesperelli, Enrico Traversa, G. Gusmano

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

28 Scopus citations


We have used x‐ray photoelectron spectroscopy (XPS) to probe the actual surface composition of alkali‐doped and undoped TiO2 films prepared by the sol‐gel technique. The role of thermal pretreatments, conducted at various temperatures, and the effect of doping with Na are discussed. XPS results are compared with the electrical response of prototype devices having TiO2 films as the active element, with the help of electrochemical impedance spectroscopy (EIS) measurements.

Original languageEnglish (US)
Pages (from-to)376-379
Number of pages4
JournalSurface and Interface Analysis
Issue number1-12
StatePublished - Jan 1 1994

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry


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