X-ray lithography for micro-and nano-fabrication at ELETTRA for interdisciplinary applications

Enzo Di Fabrizio, R. Fillipo, S. Cabrini, R. Kumar*, F. Perennes, M. Altissimo, L. Businaro, D. Cojac, L. Vaccari, M. Prasciolu, P. Candeloro

*Corresponding author for this work

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