Wide-band transmittance of one-dimensional photonic crystals carved in Si3 N4 Si O2 channel waveguides

D. Gerace*, M. Galli, D. Bajoni, G. Guizzetti, L. C. Andreani, F. Riboli, M. Melchiorri, N. Daldosso, L. Pavesi, G. Pucker, S. Cabrini, L. Businaro, E. Di Fabrizio

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

13 Scopus citations

Abstract

Experimental and theoretical investigations of photonic crystal (PhC) structures in silicon nitride/silicon dioxide (Si3 N4 Si O2) vertical waveguiding geometry are reported. One-dimensional patterns, either periodic or with cavity layers, are carved onto the channel waveguides by using focused ion beam lithography. Broadband transmittance spectroscopy in the visible and near-infrared frequency ranges is employed to show photonic band gap behavior up to the fourth order. For structures with a cavity layer, resonant peaks appear in transmittance spectra within the photonic gaps, in agreement with theory. The results show the interest of Si3 N4 Si O2 -based PhC waveguides for photonics applications from the infrared up to the visible range.

Original languageEnglish (US)
Article number211116
Pages (from-to)1-3
Number of pages3
JournalApplied Physics Letters
Volume87
Issue number21
DOIs
StatePublished - 2005
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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