Using liquid electrolytes in dielectric reliability studies

Mario Lanza, Fei Hui, Yuanyuan Shi, Tingting Han, Kechao Tang, Andrew C. Meng, Paul C. McIntyre, Trevor Petach, David Goldhaber-Gordon, Charles Hitzman, Ai Leen Koh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In reliability studies, thin dielectric films are normally placed between two solid electrodes and a potential difference is applied, which produces local physical changes in the dielectric. However, studying such features is very complex due to the need of etching one of the solid electrodes. Here we show that liquid electrolytes can be used to study the reliability of thin dielectrics. Their main advantage is that after the electrical stress, the liquid can be rinsed, exposing the surface for direct characterization.
Original languageEnglish (US)
Title of host publicationProceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Print)9781538649299
DOIs
StatePublished - Aug 30 2018
Externally publishedYes

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