Use of Water-Soluble Sugars as Novel Cross-Linkers in Electrophilic Processes: Application to Negative-Tone Photoresists Based on Poly(4-hydroxystyrene)

S. Ming Lee, Jean M.J. Fréchet*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

The use of water-soluble sugars as latent cationic cross-linkers for polymers such as poly-(4-hydroxystyrene) has been explored. Photogeneration of acid within thin films of the phenolic resin containing the sugars results in their conversion into reactive furan moieties that lead to thermal cross-linking of the phenolic resin via electrophilic aromatic substitution in a chemically amplified process. These resist materials have demonstrated high sensitivities and resolving capabilities with both deep-UV and electron-beam radiation.

Original languageEnglish (US)
Pages (from-to)1838-1841
Number of pages4
JournalChemistry of Materials
Volume6
Issue number10
DOIs
StatePublished - Oct 1 1994
Externally publishedYes

ASJC Scopus subject areas

  • Chemistry(all)
  • Chemical Engineering(all)
  • Materials Chemistry

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