Two-layer radio frequency MEMS fractal capacitors in PolyMUMPS for S-band applications

Amro M. Elshurafa, Khaled N. Salama

Research output: Contribution to journalArticlepeer-review

11 Scopus citations

Abstract

In this Letter, the authors fabricate for the first time MEMS fractal capacitors possessing two layers and compare their performance characteristics with the conventional parallel-plate capacitor and previously reported state-of-the-art single-layer MEMS fractal capacitors. Explicitly, a capacitor with a woven structure and another with an interleaved configuration were fabricated in the standard PolyMUMPS surface micromachining process and tested at S-band frequencies. The self-resonant frequencies of the fabricated capacitors were close to 10GHz, which is better than that of the parallel-plate capacitor, which measured only 5.5GHz. Further, the presented capacitors provided a higher capacitance when compared with the state-of-the-art-reported MEMS fractal capacitors created using a single layer at the expense of a lower quality factor. © 2012 The Institution of Engineering and Technology.
Original languageEnglish (US)
Pages (from-to)419
JournalMicro & Nano Letters
Volume7
Issue number5
DOIs
StatePublished - Jun 1 2012

ASJC Scopus subject areas

  • Biomedical Engineering
  • Bioengineering
  • Materials Science(all)
  • Condensed Matter Physics

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