Tunable bandpass filter based on electrothermally and electrostatically actuated mems arch resonator

Amal Z. Hajjaj, Md Abdullah Al Hafiz, Mohammad I. Younis

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

This paper demonstrates experimentally a wide bandpass filter based on an electrothermally tuned single MEMS arch resonator operated in air. The in-plane resonator is fabricated from a silicon-on-insulator wafer with a deliberate curvature to form an arch shape. A DC voltage is applied across the anchors to pass current through the resonator to induce heat and modulate its stiffness, and hence its resonance frequencies. We show that the first resonance frequency increases up to twice of the initial value while the third resonance frequency decreases until getting very close to the first resonance frequency. This leads to the phenomenon of veering, near crossing, where both modes exchange roles. Hence, the first resonance frequency becomes insensitive to axial forces and thermal actuation whereas the third resonance natural frequency becomes very sensitive. We demonstrate an exploitation of the veering phenomenon to realize a bandpass filter, where the first and third resonance modes are excited electrostatically simultaneously to achieve a bandpass. We demonstrate also that by driving both modes nonlinearly near the veering regime, so that the first mode shows softening behavior and the third mode shows hardening behavior, sudden jumps in the response from both modes are induced leading to sharp roll off from the bandpass to the stop band. We show a flat, wide, and tunable bandwidth and center frequency by controlling the electrothermal actuation voltage.

Original languageEnglish (US)
Title of host publicationMicro- and Nano-Systems Engineering and Packaging
PublisherAmerican Society of Mechanical Engineers (ASME)
Volume10
ISBN (Electronic)9780791850640
DOIs
StatePublished - Jan 1 2016
EventASME 2016 International Mechanical Engineering Congress and Exposition, IMECE 2016 - Phoenix, United States
Duration: Nov 11 2016Nov 17 2016

Conference

ConferenceASME 2016 International Mechanical Engineering Congress and Exposition, IMECE 2016
CountryUnited States
CityPhoenix
Period11/11/1611/17/16

Keywords

  • Arch Resonator
  • Bandpass Filter
  • Electrostatic Actuation
  • Electrothermal Actuation

ASJC Scopus subject areas

  • Mechanical Engineering

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