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Treatment of ZnSe substrates for homoepitaxy
K. Ohkawa
, T. Karasawa, T. Mitsuyu
Research output
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Contribution to journal
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Article
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peer-review
11
Scopus citations
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Engineering & Materials Science
Zinc Selenide
100%
Substrates
39%
Etching
29%
Reflection high energy electron diffraction
28%
Dry etching
20%
Crystallinity
16%
Polishing
15%
Mirrors
14%
Plasmas
12%
Temperature
11%
Hot Temperature
6%
Physics & Astronomy
etching
31%
plane strain
15%
polishing
14%
high energy electrons
13%
crystallinity
12%
purity
11%
electron diffraction
11%
damage
9%
mirrors
9%