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Treatment of ZnSe substrates for homoepitaxy
K. Ohkawa
, T. Karasawa, T. Mitsuyu
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peer-review
11
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Engineering & Materials Science
Zinc Selenide
Substrates
Etching
Reflection high energy electron diffraction
Dry etching
Crystallinity
Polishing
Mirrors
Plasmas
Temperature
Hot Temperature
Physics & Astronomy
etching
plane strain
polishing
high energy electrons
crystallinity
purity
electron diffraction
damage
mirrors