Transparent ITO-Mn: ITO Thin-Film Thermocouples

S. R Sarath Kumar, S. Kasiviswanathan

Research output: Contribution to journalArticlepeer-review

12 Scopus citations

Abstract

Transparent thin-film thermocouples have been fabricated with indium tin oxide (ITO) and manganese doped indium tin oxide (Mn:ITO) as the positive and negative legs, respectively. Optical transparency of the thermocouples was above 85% in the visible region of the spectrum. Presence of Mn has been found to enhance the thermoelectric response, without significantly increasing the resistivity. Seebeck voltages of ~ 20 mV and ~ 31 mV have been obtained at 625 K, respectively, for the thermocouples with Mn:ITO legs having 1.6 at.% and 4.3 at.% Mn. The response has been found to be reproducible with an error of ±2%.

Original languageEnglish (US)
Pages (from-to)809-813
Number of pages5
JournalIEEE Sensors Journal
Volume9
Issue number7
DOIs
StatePublished - 2009

Keywords

  • Thermocouple
  • thin-film devices
  • transparent conducting oxides

ASJC Scopus subject areas

  • Instrumentation
  • Electrical and Electronic Engineering

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