Transmission electron microscope sample alignment system and method

Daliang Zhang (Inventor), Yu Han (Inventor), Kun Li (Inventor), Yihan Zhu (Inventor)

Research output: Patent

Abstract

A system and method involve applying an electron beam to a sample and obtaining an image of the sample with the applied electron beam. An orientation of the sample relative to the sample's zone axis is automatically determined based on a distribution of reflections in the image. The orientation of the sample is automatically adjusted to align with the sample's zone axis based on the determined orientation.
Original languageEnglish (US)
Patent numberUS10067078B1
StatePublished - Sep 4 2018

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