Transfer-less flexible and transparent high-κ/metal gate germanium devices on bulk silicon (100)

Joanna M. Nassar, Aftab M. Hussain, Jhonathan Prieto Rojas, Muhammad Mustafa Hussain

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Flexible wearable electronics have been of great interest lately for the development of innovative future technology for various interactive applications in the field of consumer electronics and advanced healthcare, offering the promise of low-cost, lightweight, and multifunctionality. In the pursuit of this trend, high mobility channel materials need to be investigated on a flexible platform, for the development of flexible high performance devices. Germanium (Ge) is one of the most attractive alternatives for silicon (Si) for high-speed computational applications, due its higher hole and electron mobility. Thus, in this work we show a cost effective CMOS compatible process for transforming conventional rigid Ge metal oxide semiconductor capacitors (MOSCAPS) into a mechanically flexible and semi-transparent platform. Devices exhibit outstanding bendability with a bending radius of 0.24 cm, and semi-transparency up to 30 %, varying with respect to the diameter size of the release holes array.
Original languageEnglish (US)
Title of host publication14th IEEE International Conference on Nanotechnology
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages176-179
Number of pages4
ISBN (Print)9781479956227
DOIs
StatePublished - Aug 2014

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