Toward high resolution and high efficiency Zone Plate for X-ray applications

E Di Fabrizio*, F Romanato, M Gentili

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

High resolution and high efficiency Zone Plate for X-rays in the energy range of 300 eV and 12 KeV fabricated by means of electron beam and X-ray lithography are presented. Regarding the high resolution issue gold zone plate with 70 nm resolution and thickness of 0.4 mum are shown. When the efficiency is more important, multilevel zone plate can provide an increase of the first diffraction order while suppressing higher ones. The optical test of four level zone plate made by Gold or Nickel was performed at the European Synchrotron Radiation Facility, beamline ID21. At 7 KeV an efficiency of 55% was measured.

Original languageEnglish
Title of host publicationX-RAY MICROSCOPY, PROCEEDINGS
EditorsW MeyerIlse, T Warwick, D Attwood
PublisherAMER INST PHYSICS
Pages635-640
Number of pages6
ISBN (Print)1-56396-926-2
DOIs
StatePublished - 2000
Externally publishedYes
Event6th International Conference on X-Ray Microscopy - BERKELEY, Canada
Duration: Aug 2 1999Aug 6 1999

Publication series

NameAIP CONFERENCE PROCEEDINGS
PublisherAMER INST PHYSICS
Volume507
ISSN (Print)0094-243X

Conference

Conference6th International Conference on X-Ray Microscopy
CountryCanada
CityBERKELEY
Period08/2/9908/6/99

Keywords

  • LITHOGRAPHY

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