Thin film transistor (TFT) sensing elements fabricated in surface micromachined polymermems for a differential calorimetric flow sensor

S. H. Tsang*, K. Simard, I. G. Foulds, H. Izadi, K. S. Karim, M. Parameswaran

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations

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