Thin film transistor (TFT) sensing elements fabricated in surface micromachined polymermems for a differential calorimetric flow sensor

S. H. Tsang*, K. Simard, I. G. Foulds, H. Izadi, K. S. Karim, M. Parameswaran

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations

Abstract

This paper presents the first process to allow theembedding of amorphous silicon thin film transistors in surface micromachined polymerMEMSS The presented polymerMEMs fabrication technique embeds hydrogenated amorphous silicon thin film transistors (α- Si:HL TFT) into polyimide for active sensing. An out-ofplane differential calorimetric flow sensor has been fabricated using this method to demonstrate the feasibility of this fabrication process. The calorimetric flow sensor uses the α-Si:H TFTs as active sensing elements and has a linear unamplified sensitivity of 2.2mV/(cm/s). This paper provides details for the fabrication process and reports on the design and functional results of calorimetric flow sensor fabricated by embedding α-Si:lH TFTs into polymerMEMS.

Original languageEnglish (US)
Article number4805449
Pages (from-to)583-586
Number of pages4
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
DOIs
StatePublished - Jun 1 2009
Event22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy
Duration: Jan 25 2009Jan 29 2009

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Thin film transistor (TFT) sensing elements fabricated in surface micromachined polymermems for a differential calorimetric flow sensor'. Together they form a unique fingerprint.

Cite this