Thermally depolymerizable polycarbonates v. Acid catalyzed thermolysis of allylic and benzylic polycarbonates: A new route to resist imaging

Jean Frechet, Francine Bouchard, Eva Eichler, Francis M. Houlihan, Takashi Iizawa, Boguslaw Kryczka, C. Grant Willson

Research output: Contribution to journalArticlepeer-review

58 Scopus citations

Abstract

Polymers containing allylic and benzylic carbonate repeating units have been prepared by phase-transfer catalyzed polycondensation of activated bis-carbonates or carbamates and diols. The polymers are highly susceptible to thermal depolymerization and revert to small molecules when heated to temperatures which vary from 140 to 230°mperatures are reduced to well below 100°C if catalytic amounts of acid are added to the polycarbonates. The thermolysis or acidolysis of bis allylic or benzylic carbonates provides a convenient route to aromatic compounds as demonstrated with both models and polymers. The polycarbonates can be used to formulate highly sensitive resist materials with potential for self-development of positive images. Some benzylic polycarbonates which produce polymerizable divinyl monomers upon thermolysis can be used to create negative images in a process which includes both depolymerization and photocrosslinking.

Original languageEnglish (US)
Pages (from-to)31-49
Number of pages19
JournalPolymer Journal
Volume19
Issue number1
DOIs
StatePublished - Jan 1 1987

Keywords

  • Acidolysis
  • Chemical amplification
  • Phase-transfer catalysis
  • Polycarbonate
  • Polycondensation
  • Radiation-sensitive
  • Resist
  • Thermolysis
  • Thermoreversible

ASJC Scopus subject areas

  • Polymers and Plastics
  • Materials Chemistry

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