Theoretical and experimental investigation of dynamic instabilities in electrostatic MEMS

Fadi M. Al Saleem, Mohammad I. Younis

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations

Abstract

We present modeling, analysis, and experimental investigation for dynamic instabilities and bifurcations in electrostatic Micro-electro-mechanical systems (MEMS). These instabilities are induced by exciting a microstructure with a nonlinear forcing composed of a DC parallel-plate electrostatic load and an AC harmonic load. The frequency of the AC load is tuned to be near and twice the fundamental natural frequency of the structure. For this excitation method, several local bifurcations, such as saddle-node and pitchfork, and global bifurcations, such as the escape phenomenon and the homoclinic tangling occur. These lead to undesirable jumps, hysteresis, and dynamic pull-in instabilities in MEMS devices and structures. In this work, simulation results will be shown for micro-scale cantilever microbeams that illustrate the global bifurcation such as the escape phenomenon around the primary and the subharmonic resonances. The simulations results are obtained by long-time integration for the equation of motion of a reduced-order beam model. Then, theoretical and experimental investigation will be presented demonstrating these instabilities for a mille-micro-scale capacitive sensor. Experimental data for dynamic pull-in will be shown for the case of the primary excitations.

Original languageEnglish (US)
Title of host publicationSociety for Experimental Mechanics - 11th International Congress and Exhibition on Experimental and Applied Mechanics 2008
Pages2073-2080
Number of pages8
Volume4
StatePublished - 2008
Externally publishedYes
Event11th International Congress and Exhibition on Experimental and Applied Mechanics 2008 - Orlando, FL, United States
Duration: Jun 2 2008Jun 5 2008

Other

Other11th International Congress and Exhibition on Experimental and Applied Mechanics 2008
CountryUnited States
CityOrlando, FL
Period06/2/0806/5/08

ASJC Scopus subject areas

  • Mechanical Engineering
  • Mechanics of Materials

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