The influence of surface preparation on rear surface passivation of mc-Si by thermally treated direct PECVD silicon nitride

H. F.W. Dekkers*, F. Duerinckx, Stefaan De Wolf, G. Agostinelli, J. Szlufcik

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Scopus citations

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Engineering & Materials Science