The effect of squeeze-film damping on suppressing the shock response of MEMS

Hadi Yagubizade*, Mohammad I. Younis, Ghader Rezazadeh

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This paper presents an investigation into the response of a clamped-c lamped microbeam to mechanical shock under the effect of squeeze-film damping (SQFD). In this work, we solve simultaneously the nonlinear Reynolds equation, to model squeeze-film damping, coupled with a nonlinear Euler- Bernoulli beam equation. A Galerkin-based reduced-order model and a finite-deference method (FDM) are utilized for the solid domain and for the fluid domain, respectively. Several results showing the effect of gas pressure on the response of the microbeams are shown. Comparison with the results of a multi- physics nonlinear finite-element model is presented. The results indicate that squeeze-film damping has more significant effect on the response of microstructures in the dynamic shock loads compared to the quasi-static shock loads.

Original languageEnglish (US)
Title of host publicationProceedings of the ASME International Mechanical Engineering Congress and Exposition 2009, IMECE 2009
PublisherAmerican Society of Mechanical Engineers (ASME)
Pages303-308
Number of pages6
Volume12
EditionPART A
ISBN (Print)9780791843857
DOIs
StatePublished - 2010
Externally publishedYes
EventASME 2009 International Mechanical Engineering Congress and Exposition, IMECE2009 - Lake Buena Vista, FL, United States
Duration: Nov 13 2009Nov 19 2009

Other

OtherASME 2009 International Mechanical Engineering Congress and Exposition, IMECE2009
CountryUnited States
CityLake Buena Vista, FL
Period11/13/0911/19/09

ASJC Scopus subject areas

  • Mechanical Engineering

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