The design and study of water-soluble positive- and negative-tone imaging materials

Jennifer M. Havard, Dario Pasini, Jean Frechet, David R. Medeiros, Kyle Patterson, Shintaro Yamada, C. Grant Willson

Research output: Contribution to journalConference articlepeer-review

3 Scopus citations

Abstract

The interest in imaging materials with improved environmental characteristics has led us to consider imaging formulations coated from and developed in aqueous media, thus avoiding the need for both organic solvents and basic aqueous developer solutions. We have previously reported on the design of several negative-tone resists operating via radiation-induced crosslinking, and while the performance of these negative-tone systems met our basic goals, the resolution that could be achieved was limited due to swelling occurring during development. We now report on various other designs based on polyoxazoline, poly(vinyl alcohol), and methacrylate resins that circumvent this problem with approaches towards both negative- and positive- tone systems.

Original languageEnglish (US)
Pages (from-to)111-121
Number of pages11
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3333
DOIs
StatePublished - Dec 1 1998
EventAdvances in Resist Technology and Processing XV - Santa Clara, CA, United States
Duration: Feb 23 1998Feb 23 1998

Keywords

  • Chemically amplified
  • ESH
  • Negative-tone
  • Photoacid generator
  • Poly(vinyl alcohol)
  • Polymethacrylate
  • Polyoxazoline
  • Positive-tone
  • Resist
  • Water-soluble

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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