Technique for preventing stiction and notching effect on silicon-on-insulator microstructure

J. Li, Q. X. Zhang, A. Q. Liu*, W. L. Goh, J. Ahn

*Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review

    43 Scopus citations
    Original languageEnglish (US)
    Pages (from-to)2530-2539
    Number of pages10
    JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
    Volume21
    Issue number6
    DOIs
    StatePublished - Jan 1 2003

    ASJC Scopus subject areas

    • Condensed Matter Physics
    • Electrical and Electronic Engineering

    Fingerprint

    Dive into the research topics of 'Technique for preventing stiction and notching effect on silicon-on-insulator microstructure'. Together they form a unique fingerprint.

    Cite this