Tailoring silica nanotribology for CMP slurry optimization: Ca2+ cation competition in C12TAB mediated lubrication

Ivan Uriev Vakarelski, Scott C. Brown, G. Bahar Basim, Yakov I. Rabinovich, Brij M. Moudgil

Research output: Contribution to journalArticlepeer-review

9 Scopus citations

Fingerprint

Dive into the research topics of 'Tailoring silica nanotribology for CMP slurry optimization: Ca<sup>2+</sup> cation competition in C<sub>12</sub>TAB mediated lubrication'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science