Systematic investigation of amorphous transition-metal-silicon-nitride electrodes for metal gate CMOS applications

H. C. Wen*, Husam Niman Alshareef, H. Luan, K. Choi, P. Lysaght, H. R. Harris, C. Huffman, G. A. Brown, G. Bersuker, P. Zeitzoff, H. Huff, P. Majhi, B. H. Lee

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

22 Scopus citations

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Engineering & Materials Science