Synthesis of SiOC:H nanoparticles by electrical discharge in hexamethyldisilazane and water

Ahmad Hamdan, Rasha AbdulHalim, Dalaver H. Anjum, Min Suk Cha

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Abstract

Nanoparticles have unique properties and are useful in many applications. Efficient synthesis of high yields of nanoparticles remains a challenge. Here, we synthesized SiOC:H, a low-dielectric-constant material, by electrical discharge at the interface of hexamethyldisilazane and water. The nanoparticle production rate of our technique was ∼17 mg per minute. We used Fourier transform infrared spectroscopy, scanning and transmission electron microscopy, and X-ray photoemission spectroscopy to characterize the synthesized material. Heating the nanoparticles to 500 °C for 2 h released hydrogen from CHx groups and evaporated volatile compounds. Our method to produce high yields of low-dielectric-constant nanoparticles for microelectronic applications is promising.
Original languageEnglish (US)
Pages (from-to)1700089
JournalPlasma Processes and Polymers
Volume14
Issue number12
DOIs
StatePublished - Jul 25 2017

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