Syntheses and structures of novel hafnium chloroamido mono-amidinate and mono-guanidinate as precursors for HfO2 thin film

Mohamad El Eter, L. G. Hubert-Pfalzgraf, Stéphane Daniele*, Guillaume Pilet, Bernand Tinant

*Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review

    14 Scopus citations

    Abstract

    The reactions between HfCl2[N(SiMe3) 2]2 and one or two equivalents of [iPrNC(Me) NiPr]Li and iPr-NCN-iPr, at room temperature in toluene, gave the novel chloroamido-amidinato-hafnium HfCl[N(SiMe 3)2]2[iPrNC(Me)NiPr] (1) and chloroamido-guanidinato-hafnium HfCl2[N(SiMe3) 2][iPrNC(N(SiMe3)2)NiPr] (2) compounds, respectively. Compounds 1 and 2 were characterized by NMR and X-ray single crystal diffraction analysis. Their reaction towards alcohol was studied in order to check the dependency between molecular structure and HfO2 Atomic Layer Deposition (ALD) specifications.

    Original languageEnglish (US)
    Pages (from-to)2522-2526
    Number of pages5
    JournalPolyhedron
    Volume29
    Issue number12
    DOIs
    StatePublished - Aug 11 2010

    Keywords

    • Amidinate
    • Guanidinate
    • Hafnium

    ASJC Scopus subject areas

    • Physical and Theoretical Chemistry
    • Inorganic Chemistry
    • Materials Chemistry

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