Surface tension-induced PDMS micro-pillars with controllable tips and tilt angles

Huawei Li, Yiqiang Fan, David Conchouso Gonzalez, Ian G. Foulds

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Abstract

This paper reports a novel method to fabricate three-dimensional (3D) polydimethylsiloxane (PDMS) micro-pillars using a CO2 laser-machined poly(methyl methacrylate) (PMMA) mold with through-holes. This method eliminates the requirements of expensive and complicated facilities to fabricate a 3D mold. The micro-pillars were formed by the capillary force that draws PDMS into the through-holes of the PMMA mold. The tilt angles of the micro-pillars depend on the tilt angles of the through-holes in the mold, and the concave and convex micro-lens tip shapes of the PDMS micro-pillars can be modified by changing the surface wettability of the PMMA through-holes.
Original languageEnglish (US)
Pages (from-to)445-449
Number of pages5
JournalMicrosystem Technologies
Volume21
Issue number2
DOIs
StatePublished - Dec 21 2013

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering
  • Condensed Matter Physics

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