Surface roughness parameters measurements by Digital Holographic Mcroscopy (DHM)

Frédéric Montfort*, Yves Emery, Eduardo Solanas, Etienne Cuche, Nicolas Aspert, Pierre Marquet, Claude Joris, Jonas Kühn, Christian Depeursing

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

11 Scopus citations

Abstract

Digital Holographic Microscopes (DHM) allows the capture of all the information necessary to provide 3D phase measurements with a nanometer vertical resolution in a single image acquisition. DHM images provide measurements of the surface topography which can be used for surface analysis, roughness measurements for example. In this paper we present roughness measurements on micro-balls of different sizes for which numerical procedures are applied for form factor and waviness removal. DHM thus permits quantitative measurements of the roughness on a 2 dimensional area allowing enlarged information compared to common profilometers. Mean roughness of 5 to 30 nm are measured and compared to values obtained by a profilometer.

Original languageEnglish (US)
Title of host publicationThird International Symposium on Precision Mechanical Measurements
Volume6280 I
DOIs
StatePublished - 2006
Externally publishedYes
EventThird International Symposium on Precision Mechanical Measurements - Xinjiang, China
Duration: Aug 2 2006Aug 6 2006

Other

OtherThird International Symposium on Precision Mechanical Measurements
CountryChina
CityXinjiang
Period08/2/0608/6/06

Keywords

  • 3D optical topography
  • Digital holography
  • Roughness measurements
  • Surface measurements

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

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