Surface preparation techniques used for fabricating high-k/metal gate device structures

Joel Barnett*, Muhammad Mustafa Hussain, Jeff J. Peterson, Paul Kirsch, Seung Chul Song, Chang Seo Park, Gennadi Bersuker, Bvoung Hun Lee, Howard R. Huff

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

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Engineering & Materials Science