Surface and interface properties of InSb epitaxial thin films grown on GaAs by low pressure metallorganic chemical vapor deposition

K. Li*, K. L. Tan, M. Pelczynski, Z. C. Feng, A. T S Wee, J. Y. Lin, I. Ferguson, R. A. Stall

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

There is increasing interest in the epitaxial growth of high quality InSb thin films on GaAs substrates for many device applications such as infrared optoelectronics. The large lattice mismatch (14.6%) between InSb and GaAs has meant that both growth techniques and conditions have a large influence on the interface properties and consequently the film quality. A surface science study, by X-ray photoelectron spectroscopy (XPS) and Auger electron spectroscopy (AES) together with Nomarski microscopy, on the surface and interface properties of InSb/GaAs by metallorganic chemical vapor deposition is presented. It is found from the XPS data that the ambient surface is composed of InSb, In2O3, Sb2O3 and Sb2O5. The interdiffusion phenomena are studied by AES depth profiling; the width of interdiffusion region is determined to be 50±10 nm for all the samples grown at different V/III ratios. This is narrower than the data previously obtained for InSb/GaAs interfaces produced by metallorganic magnetron sputtering. The results also demonstrate that uniform and stoichiometric InSb films have been obtained, and that the reproducibility of the MOCVD technique is excellent.

Original languageEnglish (US)
Pages (from-to)63-68
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume484
StatePublished - 1997
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

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