Subharmonic excitation for electrically actuated microbeams

Ali H. Nayfeh*, Mohammad Younis

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We present analysis of the global dynamics of electrically actuated microbeams under subharmonic excitation. The microbeams are excited by a DC electrostatic force and an AC harmonic force with a frequency tuned near twice their fundamental natural frequencies. We show that the dynamic pull-in instability can occur in this case for an electric load much lower than that predicted with static analysis and the same order-of-magnitude as that predicted in the case of primary-resonance excitation. We show that, once the subharmonic resonance is activated, all frequency-response curves reach pull-in, regardless of the magnitude of the AC forcing. Our results show a limited influence of the quality factor on the frequency response. This result and the fact that the frequency-response curves have very steep passband-to-stopband transitions make the combination of a DC voltage and a subhormonic of order one-half a promising candidate for designing improved high-sensitive RF MEMS filters.

Original languageEnglish (US)
Title of host publicationProc. of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conferences - DETC2005
Subtitle of host publication20th Biennial Conf. on Mechanical Vibration and Noise
Pages391-396
Number of pages6
StatePublished - Dec 1 2005
EventDETC2005: ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - Long Beach, CA, United States
Duration: Sep 24 2005Sep 28 2005

Publication series

NameProceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - DETC2005
Volume1 A

Other

OtherDETC2005: ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
CountryUnited States
CityLong Beach, CA
Period09/24/0509/28/05

ASJC Scopus subject areas

  • Engineering(all)

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