Study on cobalt salicide on patterned wafers with 0.13um CMOS technology and below

Qin Deng, Zhihong Mai*, Ran He, Jeffrey Lam, Ramesh Rao, Kun Li

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Fingerprint

Dive into the research topics of 'Study on cobalt salicide on patterned wafers with 0.13um CMOS technology and below'. Together they form a unique fingerprint.

Engineering & Materials Science