Study of well adherent DLC film deposited on piezoelectric LiTaO 3 substrate

Jingze Tian*, Qing Zhang, Q. Zhou, S. F. Yoon, J. Ahn, S. G. Wang, Jingqi Li, D. J. Yang

*Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review

    14 Scopus citations

    Abstract

    A well adherent diamond-like carbon (DLC) film was deposited on piezoelectric LiTaO 3 substrate using PECVD by inserting SiO 2 interlayer. DLC film was characterized using Raman spectroscopy and AFM. Physical and mechanical properties were measured using XRR, ellipsometry, scratch test and nano-indentation. The DLC film exhibits the characteristics of hydrogenated amorphous carbon and a very smooth surface with a 0.25 nm RMS. Scratch test shows that critical load (L c ) is 18 N, which is good enough for applying DLC film to SAW device. The measured mass density, refractive index, hardness and Young's modulus of DLC film deposited on LiTaO 3 are comparable to the reported values for hydrogenated amorphous carbon film, irrespective of substrates on which the films were deposited.

    Original languageEnglish (US)
    Pages (from-to)255-258
    Number of pages4
    JournalApplied Surface Science
    Volume239
    Issue number3-4
    DOIs
    StatePublished - Jan 31 2005

    Keywords

    • DLC
    • Nano-indentation
    • PECVD
    • Scratch test

    ASJC Scopus subject areas

    • Chemistry(all)
    • Condensed Matter Physics
    • Physics and Astronomy(all)
    • Surfaces and Interfaces
    • Surfaces, Coatings and Films

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