Strain engineering in nanoscale CMOS FinFETs and methods to optimize R S/D

Casey Smith*, Srivatsan Parthasarathy, Brian E. Coss, Jason Williams, Hemant Adhikari, Greg Smith, Barry Sassman, Muhammad Mustafa Hussain, Prashant Majhi, Raj Jammy

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

6 Scopus citations

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Engineering & Materials Science