STEM study of interfacial reaction at HfxAl1-xO y/Si interfaces

J. Y. Dai*, Kun Li, P. F. Lee, X. Zhao, S. Redkar

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Fingerprint Dive into the research topics of 'STEM study of interfacial reaction at Hf<sub>x</sub>Al<sub>1-x</sub>O <sub>y</sub>/Si interfaces'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy