Stabilizing the dynamics of electrostatic mems resonators using delayed feedback controller

Fadi M. Alsaleem*, Mohammad I. Younis

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

We study the effect of delayed feedback controller on the dynamic stability of a MEMS resonator actuated with DC and AC voltages. We show that the delayed feedback controller, with a careful selection of its parameters, can be used to stabilize an originally unstable resonator operating in the escape (dynamic pull-in) frequency band. Also, the controller is shown to enhance the stability of the resonator near pull-in, where it experiences a strong fractal behavior. In both cases, the controller shows superior performance in rejecting disturbances. Experimental and theoretical results are presented to demonstrate the capability of the feedback controller to stabilize the performance of the capacitive resonator. A good agreement between simulation and experiment was achieved.

Original languageEnglish (US)
Title of host publicationASME 2009 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2009
Pages1671-1677
Number of pages7
Volume4
EditionPARTS A, B AND C
DOIs
StatePublished - 2009
EventASME 2009 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2009 - San Diego, CA, United States
Duration: Aug 30 2009Sep 2 2009

Other

OtherASME 2009 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2009
CountryUnited States
CitySan Diego, CA
Period08/30/0909/2/09

ASJC Scopus subject areas

  • Modeling and Simulation
  • Mechanical Engineering
  • Computer Science Applications
  • Computer Graphics and Computer-Aided Design

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