Stability analysis of electrostatically actuated resonators with delayed feedback controller

Fadi Alsaleem*, Mohammad I. Younis

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this work we investigate the stability of parallel-plate electrostatic MEMS resonators using a delayed feedback controller. Two case studies are investigated: a capacitive sensor made of cantilever beams with a proof mass at their tip and a clamped-clamped microbeam. Dover-cliff integrity curves and basin-of-attraction analysis are used for the stability assessment of the frequency response of the resonators for several scenarios of positive and negative gain in the controller. It is found that, in the case of a positive gain, a velocity or a displacement feedback controller can be used to effectively enhance the stability of the resonators. This is confirmed by an increase in the area of the safe basin of attraction and in shifting the Dover-cliff curve upward. On the other hand, it is shown that a negative gain can significantly weaken the stability of the resonators. This can be of useful use in MEMS for actuation applications, such as in the case of capacitive switches, to lower the activation voltage of these devices and to ensure their trigger under all initial conditions.

Original languageEnglish (US)
Title of host publicationASME 2010 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2010
Pages785-793
Number of pages9
Volume4
DOIs
StatePublished - 2010
Externally publishedYes
EventASME 2010 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2010 - Montreal, QC, Canada
Duration: Aug 15 2010Aug 18 2010

Other

OtherASME 2010 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2010
CountryCanada
CityMontreal, QC
Period08/15/1008/18/10

ASJC Scopus subject areas

  • Modeling and Simulation
  • Mechanical Engineering
  • Computer Science Applications
  • Computer Graphics and Computer-Aided Design

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