SrRuO3 thin films grown on MgO substrates at different oxygen partial pressures

Bin Zou, Peter K. Petrov, Neil McN. Alford

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Abstract

A comprehensive study of SrRuO3 thin films growth on (001) MgO substrates by pulsed laser deposition in a wide oxygen pressure range from 10 to 300 mTorr was carried out. The experimental results showed a correlation between the lattice constants, resistivity, and oxygen partial pressures used. Ru deficiency detected only in films deposited at lower oxygen pressures (
Original languageEnglish (US)
Pages (from-to)702-707
Number of pages6
JournalJournal of Materials Research
Volume28
Issue number5
DOIs
StatePublished - Jan 8 2013
Externally publishedYes

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