SnO2 sub-micron wires for gas sensors

P. Candeloro*, A. Carpentiero, S. Cabrini, E. Di Fabrizio, E. Comini, C. Baratto, G. Faglia, G. Sberveglieri, A. Gerardino

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

20 Scopus citations

Abstract

In the present work a novel semiconductor metal-oxide (MOX) gas sensor is developed by means of lithographic techniques. The basic idea is to replace the continuous sensing film of standard MOX sensors with a pattern of wires in the sub-micron scale. Two approaches are followed: a plain lift-off process and a substrate patterning process. This work presents a comparison of the results of the two processes. The fabricated sensors are characterized by electrical measurements in different atmospheres and their responses are compared to with the ones of continuous film based sensors. An improvement of the performances of the patterned sensor is highlighted by the experimental data.

Original languageEnglish (US)
Pages (from-to)178-184
Number of pages7
JournalMicroelectronic Engineering
Volume78-79
Issue number1-4
DOIs
StatePublished - Mar 2005
Externally publishedYes

Keywords

  • E-beam lithography
  • Gas sensors
  • Semiconductor metal-oxide
  • SiO reactive ion etching
  • Tin dioxide

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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