Simulation of SU-8 frequency-driven scratch drive actuators

David Conchouso Gonzalez, Armando Arpys Arevalo Carreno, David Castro, Ehab Jamal Al Rawashdeh, Manuel Valencia Garcia, Amir Omar Zaher, Jürgen Kosel, Ian G. Foulds

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Scopus citations

Abstract

This paper presents the simulation of Scratch Drive Actuators (SDAs) for micro-robotic applications. SDAs use electrostatic forces to generate motion on top of an interdigitated electrode array. The purpose of this investigation is to evaluate several design geometries and micro-actuator configurations using ConventorWare®'s finite element analysis module. The study performed investigates the SDAs modal and electrostatic behavior and the effects of linking two or more SDAs together in a microrobot device. In addition, the interdigitated electrode array performance, used for power delivery, was studied by changing the thickness of its dielectric layer. We present our observations based on these studies, which will aid in the understanding and development of future SDA designs. © 2013 IEEE.
Original languageEnglish (US)
Title of host publication2013 UKSim 15th International Conference on Computer Modelling and Simulation
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages803-808
Number of pages6
ISBN (Print)9780769549941
DOIs
StatePublished - Apr 2013

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