Simulation of squeeze-film damping of microplates actuated by large electrostatic load

Mohammad Younis*, Ali H. Nayfeh

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

44 Scopus citations

Abstract

We present a new method for simulating squeeze-film damping of microplates actuated by large electrostatic loads. The method enables the prediction of the quality factors of microplates under a limited range of gas pressures and applied electrostatic loads up to the pull-in instability. The method utilizes the nonlinear Euler-Bernoulli beam equation, the von Kármán plate equations, and the compressible Reynolds equation. The static deflection of the microplate is calculated using the beam model. Analytical expressions are derived for the pressure distribution in terms of the plate mode shapes around the deflected position using perturbation techniques. The static deflection and the analytical expressions are substituted into the plate equations, which are solved using a finite-element method. Several results are presented showing the effect of the pressure and the electrostatic force on the structural mode shapes, the pressure distributions, the natural frequencies, and the quality factors.

Original languageEnglish (US)
Pages (from-to)232-241
Number of pages10
JournalJournal of Computational and Nonlinear Dynamics
Volume2
Issue number3
DOIs
StatePublished - Jul 1 2007

Keywords

  • Electrostatic actuation
  • Large deflections
  • Squeeze-film damping
  • Von Kármán plate equations

ASJC Scopus subject areas

  • Mechanical Engineering
  • Applied Mathematics
  • Control and Systems Engineering

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