Simplistic graphene transfer process and its impact on contact resistance

Mohamed T. Ghoneim, Casey Smith, Muhammad Mustafa Hussain

Research output: Contribution to journalArticlepeer-review

25 Scopus citations

Abstract

Chemical vapor deposition based graphene grown on copper foil is attractive for electronic applications owing to its reliable growth process, large area coverage, and relatively defect free nature. However, transfer of the synthesized graphene to host substrate for subsequent device fabrication is extremely sensitive and can impact ultimate performance. Although ultra-high mobility is graphene's most prominent feature, problems with high contact resistance have severely limited its true potential. Therefore, we report a simple poly-(methyl methacrylate) based transfer process without post-annealing to achieve specific contact resistivity of 3.8 × 10−5 Ω cm2 which shows 80% reduction compared to previously reported values.
Original languageEnglish (US)
Pages (from-to)183115
JournalApplied Physics Letters
Volume102
Issue number18
DOIs
StatePublished - May 9 2013

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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