Silicon fabric for multi-functional applications

Galo T. Sevilla, Jhonathan Prieto Rojas, Sally Ahmed, Aftab M. Hussain, Salman Bin Inayat, Muhammad Mustafa Hussain

Research output: Chapter in Book/Report/Conference proceedingConference contribution

18 Scopus citations

Abstract

This paper reports a generic process flow to fabricate mechanically flexible and optically semi-transparent thermoelectric generators (TEGs), micro lithium-ion batteries (μLIB) and metal-oxide-semiconductor capacitors (MOSCAPs) on mono-crystalline silicon fabric platforms from standard bulk silicon (100) wafers. All the fabricated devices show outstanding mechanical flexibility and performance, making an important step towards monolithic integration of Energy Chip (self-powered devices) including energy harvesters and electronic devices on flexible platforms. We also report a recyclability process for the remaining bulk substrate after release, allowing us to achieve a low cost flexible platform for high performance applications. © 2013 IEEE.
Original languageEnglish (US)
Title of host publication2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages2636-2639
Number of pages4
ISBN (Print)9781467359818
DOIs
StatePublished - Jun 2013

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