Sensitive resonant gas sensor operating in air with metal organic frameworks coating

Nizar Jaber, Saad Ilyas, Osama Shekhah, Mohamed Eddaoudi, Mohammad I. Younis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report a practical resonant gas sensor that is uniformly coated with metal organic frameworks (MOFs) and excited near the higher order modes for a higher attained sensitivity. The resonator is based on an electrostatically excited clamped-clamped microbeam. The microbeam is fabricated from a polyimide layer coated from the top with Cr/Au and from the bottom with Cr/Au/Cr layer. The geometry of the resonator is optimized to reduce the effect of the squeeze film damping, thereby allowing operation under atmospheric pressure. The electrostatic force electrode is designed to enhance the excitation of the second mode of vibration with the minimum power required. Significant frequency shift (kHz) is demonstrated for the first time upon water vapor, acetone, and ethanol exposure due to the MOFs functionalization and the higher order modes excitation. Also, the adsorption dynamics and MOF selectivity is investigated by studying the decaying time constants of the response upon gas exposure.
Original languageEnglish (US)
Title of host publication2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages1081-1087
Number of pages7
ISBN (Print)9781538627327
DOIs
StatePublished - Aug 9 2017

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