The paper discusses capabilities of a novel theoretical and numerical-modeling based approach to scatterometry problems. This approach allows reliable detection of deviations in gratings' critical dimensions during manufacturing process. The core of the approach is simultaneous analysis in time and frequency domains and one-to-one correspondence between electromagnetics characteristics and geometrical/material properties of gratings.
|Original language||English (US)|
|Title of host publication||2013 International Symposium on Electromagnetic Theory|
|Publisher||Institute of Electrical and Electronics Engineers (IEEE)|
|State||Published - 2013|