RF MEMS Fractal Capacitors With High Self-Resonant Frequencies

Amro M. Elshurafa, Ahmed Emira, Ahmed Gomaa Radwan, Khaled N. Salama

Research output: Contribution to journalArticlepeer-review

19 Scopus citations

Abstract

This letter demonstrates RF microelectromechanical systems (MEMS) fractal capacitors possessing the highest reported self-resonant frequencies (SRFs) in PolyMUMPS to date. Explicitly, measurement results show SRFs beyond 20 GHz. Furthermore, quality factors higher than 4 throughout a band of 1-15 GHz and reaching as high as 28 were achieved. Additional benefits that are readily attainable from implementing fractal capacitors in MEMS are discussed, including suppressing residual stress warping, eliminating the need for etching holes, and reducing parasitics. The latter benefits were acquired without any fabrication intervention. © 2011 IEEE.
Original languageEnglish (US)
Pages (from-to)10-12
Number of pages3
JournalJournal of Microelectromechanical Systems
Volume21
Issue number1
DOIs
StatePublished - Dec 5 2011

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