Resist materials

Scott A. MacDonald*, Jean Frechet, Hiroshi Ito, C. Grant Willson

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

1 Scopus citations
Original languageEnglish (US)
Pages (from-to)277-278
Number of pages2
JournalMicroelectronic Engineering
Volume3
Issue number1-4
DOIs
StatePublished - Jan 1 1985

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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