Remote plasma nitridation of in-situ steam generated (ISSG) oxide

Husam Niman Alshareef, A. Karamcheti, T. Y. Luo, G. A. Brown, V. H.C. Watt, M. D. Jackson, H. R. Huff, R. Jallepally, D. Noble, N. Tam, G. Miner

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