Remarkable influence of molecular structure of N,N′-unsymmetrically substituted 1,3-amidinate and 1,3-guanidinate on the volatility and the thermal stability of precursors for HfO2 films via pulsed liquid-injection MOCVD

Mohamad El Eter*, S. Daniele, V. Brizé, C. Dubourdieu, C. Lachaud, N. Blasco, A. Pinchart

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

7 Scopus citations

Abstract

The identification of appropriate ligand-metal combinations, which successfully present the features of: (i) having acceptable melting point, (ii) being more thermally stable than hafnium alkylamides, (iii) having sufficient volatility for vapor phase distribution and (iv) enabling the deposition by liquid-injection MOCVD and ALD of hafnium containing thin films, should go through new generations of well-behaved molecular precursors. We report herein the chemical design of a portfolio of novel mono- and bis-amidinate and guanidinate alkylamide hafnium complexes of N,N′-unsymmetrically substituted 1,3-amidinate and 1,3-guanidinate [R′-N=CX-NR"] xHf(NR2)4-x (R′≠ R" = Et, iPr, tBu; R = Me or Et; X = Me, NMe2 or NEt2; x = 1 or 2). We will exemplify the remarkable influence of the molecular structure on the volatility, the thermal stability and the nature (cubic, monoclinic) of HfO 2 thin films by pulsed liquid-injection MOCVD.

Original languageEnglish (US)
Title of host publicationECS Transactions - EuroCVD 17/CVD 17
Pages151-158
Number of pages8
Edition8 PART 1
DOIs
StatePublished - Dec 1 2009
Event17th International Chemical Vapor Deposition Symposium (CVD-XVII) - 216th Meeting of the Electrochemical Society - Vienna, Austria
Duration: Oct 4 2009Oct 9 2009

Publication series

NameECS Transactions
Number8 PART 1
Volume25
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Other

Other17th International Chemical Vapor Deposition Symposium (CVD-XVII) - 216th Meeting of the Electrochemical Society
CountryAustria
CityVienna
Period10/4/0910/9/09

ASJC Scopus subject areas

  • Engineering(all)

Fingerprint

Dive into the research topics of 'Remarkable influence of molecular structure of N,N′-unsymmetrically substituted 1,3-amidinate and 1,3-guanidinate on the volatility and the thermal stability of precursors for HfO<sub>2</sub> films via pulsed liquid-injection MOCVD'. Together they form a unique fingerprint.

Cite this