Reduced-order models for MEMS applications

Ali H. Nayfeh*, Mohammad Younis, Eihab M. Abdel-Rahman

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

244 Scopus citations

Abstract

We review the development of reduced-order models for MEMS devices. Based on their implementation procedures, we classify these reduced-order models into two broad categories: node and domain methods. Node methods use lower-order approximations of the system matrices found by evaluating the system equations at each node in the discretization mesh. Domain-based methods rely on modal analysis and the Galerkin method to rewrite the system equations in terms of domain-wide modes (eigenfunctions). We summarize the major contributions in the field and discuss the advantages and disadvantages of each implementation. We then present reduced-order models for microbeams and rectangular and circular microplates. Finally, we present reduced-order approaches to model squeeze-film and thermoelastic damping in MEMS and present analytical expressions for the damping coefficients. We validate these models by comparing their results with available theoretical and experimental results.

Original languageEnglish (US)
Pages (from-to)211-236
Number of pages26
JournalNonlinear Dynamics
Volume41
Issue number1-3
DOIs
StatePublished - Aug 1 2005

Keywords

  • MEMS
  • Microbeams
  • Microplates
  • Reduced-order models
  • Squeeze-film damping
  • Thermoelastic damping

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Aerospace Engineering
  • Ocean Engineering
  • Mechanical Engineering
  • Applied Mathematics
  • Electrical and Electronic Engineering

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