Reduced-order modeling of MEMS

Ali H. Nayfeh*, Mohammad I. Younis, Eihab M. Abdel-Rahman

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

We develop reduced-order models for microelectromechanical systems (MEMS) devices using the Galerkin procedure employing the mode shapes of their structural elements. The result is a finite set of nonlinear coupled ordinary-differential equations. These equations, in turn, are used to calculate the equilibrium configurations as well as the dynamics of the devices. We apply this methodology to MEMS made of microbeams and rectangular and circular microplates. We validate these models with available experimental results and numerical solutions of the full governing partial-differential equations and associated boundary conditions.

Original languageEnglish (US)
Title of host publication3rd M.I.T. Conference on Computational Fluid and Solid Mechanics
Pages394-400
Number of pages7
StatePublished - 2005
Externally publishedYes
Event3rd M.I.T. Conference on Computational Fluid and Solid Mechanics - Boston, MA, United States
Duration: Jun 14 2005Jun 17 2005

Other

Other3rd M.I.T. Conference on Computational Fluid and Solid Mechanics
CountryUnited States
CityBoston, MA
Period06/14/0506/17/05

Keywords

  • MEMS
  • Microbeams
  • Microplates
  • Reduced-order models

ASJC Scopus subject areas

  • Fluid Flow and Transfer Processes
  • Computational Mathematics

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