Recent advances in chemically amplified resist materials

C. G. Willson*, J. F. Cameron, S. A. MacDonald, C. P. Niesert, Jean Frechet, M. K. Leung, A. Ackmann

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

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Chemical Compounds

Engineering & Materials Science